Abstract

R. S. Roy¹, Nishi Kant²* and Ravindra Kumar³**

The progress in the area of applications of ion implementation and laser treatment to III-V compound semiconductors has been presented. The achievement till todate are discussed alongwith the yet unresolved problems. It can be stated that ion implementation and laser treatment studies on GaAs and other III-V compound semiconductors are scientifically as well as technologically extremely important areas of research that offers a of avenues for innovative and useful ideas.

Ion implementation; laser treatment; compound semiconductors

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